Semiconductor device

ABSTRACT

A semiconductor device includes a first area including a logic circuit, a second area including a functional circuit, a first power line, a second power line that supplies a power to the logic circuit and the functional circuit, and a first power switch circuit connected to the first power line and the second power line, wherein the first power switch circuit includes a first transistor larger than a transistor provided in the logic circuit and being connected to the first power line and the second power line, an end cap provided in an area next to the functional circuit, and a second transistor provided between the end cap and an area including the first transistor, the second transistor being of a same size as the transistor provided in the logic circuit and being connected to the first power line and the second power line.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a divisional of U.S. patent application Ser. No.17/577,701, filed on Jan. 18, 2022, which claims the benefit of foreignpriority to Japanese Patent Application No. 2021-006441, filed on Jan.19, 2021, which is incorporated herein by reference in its entirety.

FIELD

The present disclosure relates to a semiconductor device.

BACKGROUND

According to a conventional technique, in order to reduce a leakagecurrent of a semiconductor device, power switch circuits may be providedbetween a power line and a virtual power line serving as a power linefor a plurality of circuit blocks, and the power switch circuits areturned ON when the circuit blocks operate.

SUMMARY

A semiconductor device according to the present disclosure includes afirst area in which a logic circuit is provided, a second area in whicha functional circuit that is different from the logic circuit isprovided, and a first power switch circuit provided next to the secondarea, the first power switch circuit being connected to a first powerline and a second power line that supplies a power to the logic circuitand the functional circuit, wherein the first power switch circuitincludes a first transistor that is larger than a transistor provided inthe logic circuit, the first transistor being connected to the firstpower line and the second power line, an end cap provided in an areanext to the functional circuit, and a second transistor provided betweenthe end cap and an area in which the first transistor is provided, thesecond transistor being of a same size as the transistor provided in thelogic circuit, and the second transistor being connected to connect thefirst power line and the second power line.

The object and advantages of the invention will be realized and attainedby means of the elements and combinations particularly pointed out inthe claims. It is to be understood that both the foregoing generaldescription and the following detailed description are exemplary andexplanatory and are not restrictive of the invention.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is a drawing illustrating an example of a layout of asemiconductor device according to a first embodiment;

FIG. 2 is a block diagram illustrating an example of power switchcircuits SPSW and PPSW of FIG. 1 ;

FIG. 3 is a drawing illustrating an example of a layout of the powerswitch circuit PPSW provided in the peripheral area of FIG. 1 ;

FIG. 4 is a drawing illustrating an example of a layout of power wiresof the power switch circuit PPSW of FIG. 3 ;

FIG. 5 is a drawing illustrating a layout of fins, gate electrodes, andlocal interconnects of FIG. 4 ;

FIG. 6 is a perspective view illustrating an example of a structure ofn₂-fin×m₁ transistors of FIG. 3 and FIG. 4 ;

FIG. 7 is a cross-sectional view taken along Y1-Y1′ of FIG. 4 ;

FIG. 8 is a cross-sectional view taken along X1-X1′ of FIG. 4 ;

FIG. 9 is a drawing illustrating an example of a layout of the powerswitch circuit SPSW provided in a standard cell area of FIG. 1 ;

FIG. 10 is a drawing illustrating an example of a circuit layout ofanother power switch circuit according to a comparative example;

FIG. 11 is a drawing illustrating an example of a layout of asemiconductor device according to a second embodiment;

FIG. 12 is a drawing illustrating an example of a layout of asemiconductor device according to a third embodiment;

FIG. 13 is a drawing illustrating an example of a layout of asemiconductor device according to a fourth embodiment;

FIG. 14 is a drawing illustrating an example of a layout of asemiconductor device according to a fifth embodiment; and

FIG. 15 is a drawing illustrating an example of a layout of asemiconductor device according to a sixth embodiment.

DESCRIPTION OF EMBODIMENTS

According to a conventional technique, in order to reduce a leakagecurrent of a semiconductor device, power switch circuits may be providedbetween a power line and a virtual power line serving as a power linefor a plurality of circuit blocks, and the power switch circuits areturned ON when the circuit blocks operate.

In order to increase the power supply capacity of the power switchcircuit, the size of a transistor provided in the power switch circuitis designed to be larger than the sizes of a cell transistor provided ina logic circuit. In a case where transistors of different sizes arearranged next to one another, gate electrodes and the like of smalltransistors are likely to vary in shape during manufacturing of asemiconductor device. In order to reduce the variation in shape,transistors that are different in size from one another are arrangedwith intervals determined according to a layout rule. For example, witha vacant area being provided at an end of a power switch circuit,transistors of the power switch circuit and transistors of the logiccircuit and the like provided next to the power switch circuit arearranged with intervals that satisfy the layout rule. For example, dummygate electrodes, dummy transistors, and the like are provided in thevacant area of the power switch circuit. (See, for example, U.S. patentSer. No. 10/141,336, United States Patent Application Publication No.2019/0244900, United States Patent Application Publication No.2019/0214377, Japanese Patent Laid-Open No. 2018-190760, andInternational Publication No. 2017/208887)

Recently, in order to achieve higher integration and reduce leakagecurrents in semiconductor devices, planar field effect transistors(planar FETs) that are conventionally provided in semiconductor devicesare now being replaced with, for example, fin field-effect transistors(FinFETs) and the like that have a three-dimensional structure.Accordingly, a difference between the size of a transistor provided in alogic circuit and the size of a transistor provided in a power switchcircuit is likely to increase. In addition, in order to reduce thevariation in the shapes of the gate electrodes and the like duringmanufacturing, a relatively large vacant area is provided at an end ofthe power switch circuit.

In accordance with an increase in the size of the vacant area, the sizeof the power switch circuit increases, and the power supply capacity perunit size decreases. Generally, multiple power switch circuits areprovided in a semiconductor device. Therefore, in accordance with anincrease in the size of the power switch circuit, the size of the logiccircuit that can be provided in the semiconductor device decreases. Whenthe size of the logic circuit is to be maintained, the chip size of thesemiconductor device increases.

Accordingly, it is desired to alleviate the reduction of the powersupply capacity even in a case where the vacant area is required in thepower switch circuit.

Hereinafter, embodiments are specifically described with reference tothe attached drawings. In the following explanation, power lines forsupplying powers are denoted with power names and reference symbols.

First Embodiment

FIG. 1 illustrates an example of a layout of a semiconductor deviceaccording to a first embodiment. For example, a semiconductor device 100as illustrated in FIG. 1 includes at least one power domain PD1. Astandard cell area SCA including multiple standard cells, notillustrated, and multiple peripheral areas PA including one or morerandom access memories (RAMS) are provided in the power domain PD1. Thestandard cell area SCA is an example of a first area in which a logiccircuit is provided. The peripheral area PA is an example of a secondarea in which a functional circuit that is different from the logiccircuit is provided.

FIG. 1 illustrates only one power domain PD1, but the semiconductordevice 100 may include multiple power domains. In FIG. 1 , the left sideof the power domain PD1 may be a chip edge of the semiconductor device100. The transistor provided in the semiconductor device 100 is notparticularly limited, but may be, for example, a FinFET. The FinFET isexplained with reference to FIG. 6 .

In the standard cell area SCA, multiple power switch circuits SPSW arearranged with intervals. An end cap ECAP indicated by a shading patternis provided around the standard cell area SCA. The end cap ECAP includesdummy gate electrodes or dummy transistors. In the standard cell areaSCA, the power switch circuit SPSW does not have to be provided, andonly standard cells may be provided.

In each of the peripheral areas PA, one or more RAMs are provided. Insome of the peripheral areas PA, multiple power switch circuits PPSW andthe end caps ECAP are provided next to RAMs. The RAM is an example of amemory intellectual property (memory IP) that is a hard macro, and is anexample of a functional circuit including a predetermined function. Thepower switch circuit PPSW is an example of a first power switch circuit.The power switch circuit SPSW is an example of a second power switchcircuit.

FIG. 2 illustrates an example of the power switch circuits SPSW and PPSWof FIG. 1 . The power switch circuit PPSW includes a P-channeltransistor PT1 and a power switch control circuit PCNT1. The powerswitch circuit SPSW includes a P-channel transistor PT2 and a powerswitch control circuit PCNT2. In actual implementation, each of theP-channel transistors PT1 and PT2 includes multiple transistorsconnected in parallel. The power switch circuit SPSW and the powerswitch circuit PPSW may include N-channel transistors, instead of theP-channel transistor PT1 and the P-channel transistor PT2. In this case,the source of the N-channel transistor is connected to a ground lineVSS; and the drain of the N-channel transistor is connected to a virtualground line that is connected to the logic circuit of the standard cellto supply the ground potential.

The source of the P-channel transistor PT1 is connected to, for example,a power line VDD to which an external power VDD is provided; and thedrain of the P-channel transistor is connected to a virtual power lineVVDD that is connected to the power terminals of the standard cell andthe RAM. The power line VDD is an example of a first power line, and thevirtual power line VVDD is an example of a second power line. The gateelectrode of the P-channel transistor PT1 is connected to the output ofthe power switch control circuit PCNT1.

The source of the P-channel transistor PT2 is connected to the powerline VDD, and the drain of the P-channel transistor is connected to thevirtual power line VVDD. The gate electrode of the P-channel transistorPT2 is connected to the output of the power switch control circuitPCNT2.

Because the power switch control circuits PCNT1 and PCNT2 operate at alltimes, the power switch control circuits PCNT1 and PCNT2 are connectedto the power line VDD and the ground line VSS, and operate according tothe power control signal PCNT. In a case where the power control signalPCNT indicates an active mode in which the circuit in the power domainPD1 is caused to operate, the power switch control circuit PCNT1 causesthe ground voltage VSS to be supplied to the gate electrode of theP-channel transistor PT1. Accordingly, the P-channel transistor PT1 isturned ON, and the power line VDD and the virtual power line VVDD areconnected to each other.

In a case where the power control signal PCNT indicates an active mode,the power switch control circuit PCNT2 causes the ground voltage VSS tobe supplied to the gate electrode of the P-channel transistor PT2.Accordingly, the P-channel transistor PT2 is turned ON, and the powerline VDD and the virtual power line VVDD are connected to each other.

In a case where the power control signal PCNT indicates a power downmode, the power switch control circuit PCNT1 causes the power voltageVDD to be supplied to the gate electrode of the P-channel transistorPT1. Accordingly, the P-channel transistor PT1 is turned OFF, and theconnection between the power line VDD and the virtual power line VVDD iscut off.

In a case where the power control signal PCNT indicates a power downmode, the power switch control circuit PCNT2 causes the power voltageVDD to be supplied to the gate electrode of the P-channel transistorPT2. Accordingly, the P-channel transistor PT2 is turned OFF, and theconnection between the power line VDD and the virtual power line VVDD iscut off. Accordingly, the P-channel transistors PT1 and PT2 operateaccording to the common power control signal PCNT, and function as apower switch that is connected to the power line VDD and the virtualpower line VVDD.

The power terminal of the RAM is connected to the virtual power lineVVDD, and the ground terminal of the RAM is connected to the ground lineVSS. Likewise, the power terminal of the standard cell is connected tothe virtual power line VVDD, and the ground terminal of the standardcell is connected to the ground line VSS.

The P-channel transistors PT1 and PT2 are turned ON during the activemode, so that the power line VDD is connected to the virtual power lineVVDD. Accordingly, during the active mode, the RAM and the standard cellin the power domain PD1 operate by receiving the power voltage VDD viathe virtual power line VVDD. Conversely, during the power down mode, theP-channel transistors PT1 and PT2 are turned OFF, so that the connectionbetween the power line VDD and the virtual power line VVDD is cut off.Accordingly, during the power down mode, the power voltage VDD is notsupplied to the RAM and the standard cell in the power domain PD1, sothat the RAM and the standard cell in the power domain PD1 stopoperations.

The gate electrodes of multiple P-channel transistors PT1 may receivecontrol signals at points in time different from one another from thepower switch control circuits PCNT1, so that the multiple P-channeltransistors PT1 are successively turned ON and successively turned OFF.Likewise, the gate electrodes of multiple P-channel transistors PT2 mayreceive control signals at points in time different from one anotherfrom the power switch control circuits PCNT2, so that the multipleP-channel transistors PT2 are successively turned ON and successivelyturned OFF.

By causing the P-channel transistors PT1 (or PT2) to operate atdifferent points in time, a current is prevented from rapidly flowingfrom the power VDD to the virtual power line VVDD. Accordingly, powernoise that occurs at the start of operations of the power switchcircuits PPSW and SPSW can be alleviated.

FIG. 3 illustrates an example of a layout of the power switch circuitPPSW provided in the peripheral area PA of FIG. 1 . In FIG. 3 , forexample, the power switch circuit PPSW is a four-row height cell thatuses four areas spanning between five power lines (VVDD and VSS)extending in the X direction. The power switch circuit PPSW may be adouble height cell (a two-row height cell), or may be an eight-rowheight cell. The X direction is an example of a first direction.

The power switch circuit PPSW includes a main transistor MTr, asub-transistor STr, additional transistors ATr1 and ATr2, a well tapWLT, a main buffer unit MBUF, a sub-buffer unit SBUF, and two end capsECAP. The main transistor MTr, the sub-transistor STr, and theadditional transistors ATr1 and ATr2 include multiple P-channeltransistors corresponding to the P-channel transistor PT1 as illustratedin FIG. 2 . The main transistor MTr and the sub-transistor STr are anexample of a first transistor. The additional transistor ATr1 is anexample of a second transistor. The additional transistor ATr2 is anexample of a fifth transistor.

The main transistor MTr includes multiple transistors including n₁ finsand m₁ gate electrodes (hereinafter also referred to as n₁-fins×m₁transistors). The main transistor MTr includes multiple transistorsincluding n₂ fins and m₁ gate electrodes (hereinafter also referred toas n₂-fins×m₁ transistors). The additional transistors ATr1 and ATr2include multiple transistors including n₂ fins and m₂ gate electrodes(hereinafter also referred to as n₂-fins×m₂ transistors). In this case,n₁, n₂, m₁ and m₂ are any given natural numbers that satisfy therelationships of n₁>n₂ and m₁>m₂.

The sizes of the respective transistors are different according to thenumber of fins and the number of gate electrodes. For example, in a casewhere n₁=8, n₂=3, m₁=10, and m₂=1, the sizes of the transistor are, inan ascending order of the size, the size of n₁-fin×m₁ transistor >thesize of n₂-fin×m₁ transistor >the size of n₂-fin×m₂ transistor. Forexample, the size of the n₂-fin×m₂ transistor is the same as the size ofany one of the multiple types of transistors provided in the logiccircuit of the standard cell area SCA of FIG. 1 .

The main buffer unit MBUF and sub-buffer unit SBUF are included in thepower switch control circuit PCNT1 as illustrated in FIG. 2 . The mainbuffer unit MBUF controls the operations of the main transistor MTr andthe additional transistors ATr1 and ATr2, and the sub-buffer unit SBUFcontrols the operation of the sub-transistor STr. The additionaltransistors ATr1 and ATr2 may be controlled by the sub-buffer unit SBUF.

The well tap WLT supplies the power voltage VVDD to well areas whereP-channel transistors are formed. Two end caps ECAP are provided at bothends in the X direction, i.e., the horizontal direction of FIG. 3 .

In this embodiment, according to the layout rule of the semiconductordevice 100, the ends of the n₁-fin×m₁ transistors in the X direction andthe end of the layout area of the power switch circuit PPSW are spacedapart by a space SP1 or greater. The rule of the space SP1 is set so asto alleviate variation in the shapes of the gate electrodes and the likeof the n₁-fin×m₁ transistors during manufacturing of the semiconductordevice 100 due to external factors such as other circuits provided nextto the power switch circuit PPSW and to alleviate variation in theelectrical characteristics of the transistors.

For example, the width of the end cap ECAP in the X direction is smallerthan the space SP1, and there is a vacant area between the end cap ECAPand the n₁-fin×m₁ transistor. In this embodiment, an additionaltransistor ATr1 that functions as a power switch is provided in thisvacant area. In addition, in another vacant area of the power switchcircuit PPSW (specifically, in this example, a vacant area between themain buffer unit MBUF and the sub-buffer unit SBUF), the additionaltransistor ATr2 that functions as a power switch is provided.

In this manner, the main transistor MTr, the sub-transistor STr, and theadditional transistors ATr1 and ATr2 function as a power switchconnected to the power line VDD and the virtual power line VVDD.Therefore, in the power switch circuit PPSW, the power supply capacityof the power switch circuit PPSW can be improved by the additionaltransistor ATr1 provided in the vacant area that occurs due to thelimitation associated with the layout rule (i.e., the space SP1).

In this case, the additional transistor ATr1 has the same structure asthe n₂-fin×m₂ transistor used for the logic circuit provided in thestandard cell area SCA. Therefore, this can contribute to the reductionof variation in the shapes of the gate electrodes and the like ofcircuits provided next to the power switch circuit PPSW.

In addition, in the power switch circuit PPSW, the power supply capacityof the power switch circuit PPSW can be improved by the additionaltransistor ATr2 provided in the vacant area that occurs due to thecircuit layout. As a result, the power supply capacity can be improvedwithout increasing the layout area of the power switch circuit PPSW.

Specifically, by providing the additional transistors ATr1 and ATr2 inthe vacant area, the power supply capacity of the P-channel transistorPT1 can be improved while alleviating the increase of the layout area ofthe power switch circuit PPSW.

FIG. 4 illustrates an example of a layout of the power wires in thepower switch circuit PPSW of FIG. 3 . FIG. 4 illustrates a layoutcorresponding to a double height cell including the main transistor MTr,the additional transistors, and the end cap ECAP on the right side inthe power switch circuit PPSW of FIG. 3 . In the following explanation,the virtual power line VVDD and the ground line VSS connected from theoutside of the power switch circuit PPSW may also be referred to aspower lines VVDD and VSS, respectively. The virtual power line VVDD andthe power line VDD that are closed in the power switch circuit PPSW mayalso be referred to as wires VVDD and VDD, respectively. In the exampleof FIG. 4 , n₁=8, n₂=3, m₁=10, and m₂=1.

Two power lines VVDD and a single power line VSS are formed by using anM0 layer. The M0 layer is a metal wire layer that is provided closest tothe semiconductor substrate. Wires in the M0 layer extend in the Xdirection (the horizontal direction of FIG. 4 ). Between the power lineVSS and each of the power lines VVDD, wires VDD and VVDD and a signalline SIG are formed by using the M0 layer. For example, the signal lineSIG is a gate wire of the P-channel transistor PT1 as illustrated inFIG. 2 .

A local interconnect VDD extending in the Y direction is connected tothe wire VDD in the M0 layer through a via. The Y direction is anexample of a second direction perpendicular to the X direction. The wireVDD in the M0 layer is connected to a power line VDD formed by using ametal wire layer in an upper layer through a via, not illustrated. Alocal interconnect VVDD extending in the Y direction is connected to thewire VVDD in the M0 layer and the power line VVDD in the M0 layerthrough vias. The wire VVDD in the M0 layer and the power line VVDD maybe connected to a power line VVDD formed by using the metal wire layerin the upper layer. The local interconnects VDD and VVDD are providedbetween gate electrodes G extending in the Y direction.

Fins extend in the X direction, and are arranged spaced apart in the Ydirection. For example, the n₂-fin×m₁ transistor includes dummy gateelectrodes DMYG on both sides in the X direction, and therefore, then₂-fin×m₁ transistor includes (m₁+2) gate electrodes. Likewise, then₂-fin×m₂ transistor includes dummy gate electrodes DMYG on both sidesin the X direction, and therefore, the n₂-fin×m₂ transistor includes(m₂+2) gate electrodes. In the example as illustrated in FIG. 4 , theend cap ECAP includes three dummy gate electrodes DMYG and dummy localinterconnects provided between neighboring dummy gate electrodes DMYG.

In the n₂-fin×m₁ transistor and the n₂-fin×m₂ transistor, a source areaS or a drain area D is formed between any given two gate electrodes Gprovided next to each other. The source areas S and the drain areas Dare formed alternately with the gate electrode G being interposedtherebetween. The wire VDD is connected to the source area S. The wireVVDD is connected to the drain area D. In the FinFET, fins are formed ineach of the source areas S and the drain areas D. Therefore, the localinterconnect VDD is connected to a fin that functions as the source areaS, and the local interconnect VVDD is connected to a fin that functionsas the drain area D.

FIG. 5 illustrates the layout of the fins, the gate electrodes G, andthe local interconnects of FIG. 4 . The gate electrodes G and the localinterconnects are formed in the Y direction to cross the fins thatextend in the X direction.

FIG. 6 illustrates an example of a structure of the n₂-fin×m₁ transistorof FIG. 3 and FIG. 4 . A fin transistor includes: a fin extending in theX direction provided on the semiconductor substrate; and a gateelectrode G extending in the Y direction to cross the fin. A gateinsulating film is formed at a portion of the fin facing the gateelectrode G, so that a channel of the transistor is formed on thesurface portion of the fin covered with the gate insulating film.

Also, a source area S and a drain area D are provided in the fin oneither side of the gate electrode G. Although not illustrated, in eachof the source areas S and each of the drain areas D, the localinterconnect VDD and the local interconnect VVDD are provided along thedirection in which the gate electrode G extends. In the power switchcircuit PPSW as illustrated in FIG. 4 , the P-channel transistors areformed, the source areas S are connected to the wire VDD, and the drainareas D are connected to the wire VVDD. In FIG. 6 , the source area Sand the drain area D may be swapped with each other.

FIG. 7 illustrates a cross section taken along line Y1-Y1′ of FIG. 4 .The fins are formed in a device isolation insulating film such as ashallow trench isolation (STI) that is formed on the semiconductorsubstrate. In the cross section illustrated in FIG. 7 , upper portionsof the fins protruding above the device isolation insulating film arecovered with the local interconnects VVDD. In the cross section asillustrated in FIG. 7 , each of the local interconnects VVDD isconnected to the power line VVDD and the wire VVDD formed in the M0layer through the vias. The local interconnects VVDD, the vias, and thewires VVDD and VDD formed in the M0 layer are electrically isolated fromone another by an interlayer insulating film.

FIG. 8 illustrates a cross section taken along line X1-X1′ of FIG. 4 .In the cross section as illustrated in FIG. 8 , the local interconnectsand the gate electrodes are formed alternately on the fins. Among thelocal interconnects, a local interconnect connected to the drain area ofa transistor, not illustrated, is connected to the wire VVDD formed inthe M0 layer.

FIG. 9 illustrates an example of a layout of the power switch circuitSPSW provided in the standard cell area SCA of FIG. 1 . Substantiallythe same components as the components of FIG. 3 are denoted with thesame reference numerals, and detailed description thereabout is omitted.The power switch circuit SPSW provided in the standard cell area SCAdoes not have the end cap ECAP, and the space SP1 defined by the layoutrule is unnecessary.

However, for example, in a case where the power switch circuit SPSW isnext to an end cap ECAP provided to enclose the standard cell area SCA,it is desired to provide the space SP1 between the power switch circuitSPSW and the end cap ECAP. In such a case, as illustrated in the exampleof FIG. 9 , the additional transistor ATr1 (including n₂-fin×m₂transistors) is provided in the space SP1. In a case where the powerswitch circuit SPSW is provided spaced apart from the end cap ECAPprovided to enclose the standard cell area SCA, the space SP1 and theadditional transistor ATr1 provided in the space SP1 may be omitted.

The remaining configuration of the power switch circuit SPSW issubstantially the same as the configuration of the power switch circuitPPSW of FIG. 3 . In addition, in another vacant area of the power switchcircuit SPSW (specifically, in this example, a vacant area between themain buffer unit MBUF and the sub-buffer unit SBUF), the additionaltransistor ATr2 (n₂-fin×m₂ transistor) that functions as a power switchis provided.

The main transistor MTr and the sub-transistor STr provided in the powerswitch circuit SPSW are examples of third transistors. The additionaltransistor ATr1 provided in the power switch circuit SPSW is an exampleof a fourth transistor. The additional transistor ATr2 is an example ofa fifth transistor.

Similarly to the power switch circuit PPSW as illustrated in FIG. 3 ,the main transistor MTr, the sub-transistor STr, and the additionaltransistors ATr1 and ATr2 of the power switch circuit SPSW function asthe power switch connected to the power line VDD and the virtual powerline VVDD. Therefore, in the power switch circuit SPSW, the power supplycapacity of the power switch circuit SPSW can be improved by theadditional transistor ATr1 provided in the vacant area that occurs dueto the limitation associated with the layout rule (i.e., the space SP1).

In this case, the additional transistor ATr1 has the same structure asthe n₂-fin×m₂ transistor used for the logic circuit provided in thestandard cell area SCA. Therefore, the power switch circuit SPSWprovided next to the end cap ECAP can alleviate variation in the shapesof the gate electrodes and the like due to other circuits, otherpatterns, and the like provided outside of the standard cell area SCA.

In the power switch circuit SPSW, the power supply capacity of the powerswitch circuit SPSW can be improved by the additional transistor ATr2provided in the vacant area that occurs due to the circuit layout. As aresult, the power supply capacity can be improved without increasing thelayout area of the power switch circuit SPSW.

Specifically, by providing the additional transistors ATr1 and ATr2 inthe vacant area, the power supply capacity of the P-channel transistorPT2 can be improved while alleviating the increase of the layout area ofthe power switch circuit SPSW.

FIG. 10 illustrates an example of a circuit layout of another powerswitch circuit PSW according to a comparative example. Substantially thesame components as the components of FIG. 3 are denoted with the samereference numerals, and detailed description thereabout is omitted. Inthe power switch circuit PSW as illustrated in FIG. 10 , transistors arenot provided in the areas where the additional transistors ATr1 and ATr2are provided in the power switch circuit PPSW of FIG. 3 , and theseareas are vacant areas E1 and E2 in the another power switch circuit PSWaccording to the comparative example. In this case, the power supplycapacity of the power switch circuit PSW is lower than the power supplycapacity of the power switch circuit PPSW of FIG. 3 and the power switchcircuit SPSW of FIG. 9 .

Hereinabove, in this embodiment, the additional transistor ATr1 isprovided in the vacant area that occurs due to the limitation associatedwith the layout rule (i.e., the space SP1) in each of the power switchcircuits PPSW and SPSW. Accordingly, the power supply capacity can beimproved without increasing the layout areas of the power switchcircuits PPSW and SPSW. In other words, even in a case where a vacantarea is desired to be provided in the power switch circuits PPSW andSPSW due to the limitation associated with the layout rule, thereduction of the power supply capacity can be alleviated.

The additional transistor ATr1 has the same structure as the 3fin×1transistor used for the logic circuit provided in the standard cell areaSCA. Therefore, this can contribute to the reduction of variation in theshapes of the gate electrodes and the like of circuits provided next tothe power switch circuits PPSW and SPSW.

In addition, in the power switch circuits PPSW and SPSW, the powersupply capacity of the power switch circuits PPSW and SPSW can beimproved by the additional transistor ATr2 provided in the vacant areathat occurs due to the circuit layout. Accordingly, the power supplycapacity can be improved without increasing the layout areas of thepower switch circuits PPSW and SPSW.

Second Embodiment

FIG. 11 illustrates an example of a layout of a semiconductor device 102according to the second embodiment. Substantially the same components asthe components of FIG. 1 are denoted with the same reference numerals,and detailed description thereabout is omitted. The semiconductor device102 as illustrated in FIG. 10 includes, for example, power domains PD2and PD3 on the left side in the X direction of the power domain PD1 asillustrated in FIG. 1 .

In the power domain PD2, substantially the same circuit as the powerdomain PD1 is provided. In the power domain PD3, a circuit that operatesat all times while the power is supplied to the semiconductor device 102is provided, and therefore, the power switch circuits PPSW and SPSW arenot provided in the power domain PD3.

Hereinabove, in this embodiment, even in a case where multiple powerdomains PD1, PD2, and PD3 are provided next to each other, the powersupply capacity can be improved without increasing the layout areas ofthe power switch circuits PPSW and SPSW, in a manner similar to theabove-described first embodiment.

Third Embodiment

FIG. 12 illustrates an example of a layout of a semiconductor device 104according to the third embodiment. Substantially the same components asthe components of FIG. 1 are denoted with the same reference numerals,and detailed description thereabout is omitted. In the semiconductordevice 104 as illustrated in FIG. 11 , RAMs and an analog IP areprovided in the peripheral areas PA.

In the semiconductor device 104, circuits other than the analog IPoperate at all times while the power is supplied to the semiconductordevice 104. Therefore, power switch circuits PPSW are provided on bothsides of the analog IP in the X direction, and the analog IP and thepower switch circuits PPSW belong to the power domain PD4.

Hereinabove, in this embodiment, the power supply capacity can beimproved without increasing the layout area of the power switch circuitPPSW, in a manner similar to the above-described embodiments.

Fourth Embodiment

FIG. 13 illustrates an example of a layout of a semiconductor device 106according to the fourth embodiment. Substantially the same components asthe components of FIG. 1 are denoted with the same reference numerals,and detailed description thereabout is omitted. The semiconductor device106 as illustrated in FIG. 13 includes two rows of power switch circuitsin an area next to RAMs. The two rows of power switch circuits includemultiple power switch circuits PPSW. Multiple power switch circuits PPSWin each of the two rows of power switch circuits are arranged in the Ydirection. Specifically, the semiconductor device 106 includes the powerswitch circuits PPSW that are greater in number than the power switchcircuits PPSW of the semiconductor device 100 of FIG. 1 . The remainingconfiguration of the semiconductor device 106 is substantially the sameas the configuration of the semiconductor device 100 of FIG. 1 .

Hereinabove, in this embodiment, the power supply capacity can beimproved without increasing the layout area of the power switch circuitPPSW, in a manner similar to the above-described embodiments.Furthermore, in this embodiment, in a case where the power domain PD1 ofthe semiconductor device 106 includes the vacant area, the power switchcircuits PPSW are added by making use of the vacant area, so that thepower supply capacity of the power domain PD1 can be further improved.

Fifth Embodiment

FIG. 14 illustrates an example of a layout of a semiconductor device 108according to a fifth embodiment. Substantially the same components asthe components of FIG. 1 are denoted with the same reference numerals,and detailed description thereabout is omitted. The semiconductor device108 as illustrated in FIG. 14 includes multiple types of power switchcircuits PPSW (PPSWa, PPSWb, and PPSWc) that are arranged in powerswitch areas provided around the standard cell area SCA. The powerswitch circuits SPSW as illustrated in FIG. 1 are not provided in thestandard cell area SCA. The powers VVDD that are operation powers ofcircuits provided in the standard cell area SCA are supplied from thepower switch circuits PPSW through a wire layer in an upper layer, notillustrated.

The power switch circuits PPSWa are provided on both sides of thestandard cell area SCA in the X direction. The power switch circuitsPPSWa include n₂-fin×m₁ transistors and n₁-fin×m₁ transistors arrangedin the central portion in the X direction. In addition, the power switchcircuit PPSWa includes n₂-fin×m₂ transistors and end caps ECAP arrangedon both sides in the X direction that is a direction in which the gateelectrodes of the n₂-fin×m₁ transistors and the n₁-fin×m₁ transistorsare arrayed.

The n₂-fin×m₂ transistors are provided next to the n₂-fin×m₁ transistorsand the n₁-fin×m₁ transistors. The end cap ECAP is arranged on theopposite side of the n₂-fin×m₂ transistors from the n₂-fin×m₁transistors and the n₁-fin×m₁ transistors. Spaces SP1 defined by thelayout rule are secured by the end cap ECAP and the n₂-fin×m₂transistors next to the end cap ECAP.

The power switch circuits PPSWb are arranged at corner portions aroundthe standard cell area SCA. The end caps ECAP are provided in theperipheral portions of the power switch circuits PPSWb except the endportion on the side of the power switch circuit PPSWc. In addition, thepower switch circuits PPSWb include: the n₂-fin×m₂ transistors next tothe end cap ECAP provided at the end in the X direction; and then₁-fin×m₁ transistors and n₂-fin×m₁ transistors provided next to therows of the n₂-fin×m₂ transistors. Likewise, in the power switch circuitPPSWb, spaces SP1 are also secured by the end cap ECAP and the n₂-fin×m₂transistors next to the end cap ECAP.

The power switch circuits PPSWc are arranged on both sides of thestandard cell area SCA in the Y direction. The power switch circuitsPPSWc have a configuration in which the n₂-fin×m₂ transistors and theend cap ECAP next to the n₂-fin×m₂ transistors in the X direction areremoved from the power switch circuit PPSWb.

The power switch circuits PPSWa, PPSWb, and PPSWc do not have to includea main buffer unit MBUF and a sub-buffer unit SBUF. In this case, thepower switch control circuits PCNT1 as illustrated in FIG. 2 areprovided outside of the power switch circuits PPSWa, PPSWb, and PPSWc.

Hereinabove, in this embodiment, the power supply capacity can beimproved without increasing the layout area of the power switch circuitPPSW, in a manner similar to the above-described embodiments. Further,in this embodiment, the power switch circuits PPSWa, PPSWb, and PPSWcare provided around the standard cell area SCA, and accordingly, it isnot necessary to provide the power switch circuits SPSW in the standardcell area SCA. Therefore, the logic circuits in the standard cell areaSCA can be connected without being affected by the power switch circuitsSPSW, and the propagation delay times of signals can be minimized. As aresult, this can contribute to the improvement of the performance of thesemiconductor device 108.

Sixth Embodiment

FIG. 15 illustrates an example of a layout of a semiconductor device 110according to the sixth embodiment. Substantially the same components asthe components of FIG. 1 and FIG. 14 are denoted with the same referencenumerals, and detailed description thereabout is omitted. Thesemiconductor device 110 as illustrated in FIG. 15 includes multipletypes of power switch circuits PPSW (PPSWb, PPSWc, PPSWd, and PPSWe)that are arranged in power switch areas that are provided next to oneside of the standard cell area SCA in the Y direction. Similar to FIG.14 , the power switch circuits SPSW as illustrated in FIG. 1 are notprovided in the standard cell area SCA. Therefore, the powers VVDD thatare operation powers of circuits provided in the standard cell area SCAare supplied from the power switch circuits PPSW through a wire layer inan upper layer, not illustrated.

In this embodiment, the power switch circuits PPSWe are provided on theinner side of the power switch circuits PPSWb, PPSWc, and PPSWd providedin the ring shape. The power switch circuits PPSWb and PPSWc have thesame configuration as the power switch circuits PPSWb and PPSWc of FIG.14 .

The power switch circuits PPSWd include n₂-fin×m₁ transistors andn₁-fin×m₁ transistors arranged on the left side in the X direction.Also, the power switch circuits PPSWd include n₂-fin×m₂ transistors andend cap ECAP provided successively on the opposite side of the powerswitch circuits PPSWe in the X direction.

Also, spaces SP1 are secured by n₂-fin×m₂ transistors and the end capECAP next to the n₂-fin×m₂ transistors. The power switch circuits PPSWdhave a configuration in which one row of n₂-fin×m₂ transistors and oneend cap ECAP are removed from the power switch circuit PPSWa of FIG. 14. This is because one end of the power switch circuit PPSWd in the Xdirection is provided without being next to the standard cell area SCA.

The power switch circuits PPSWe are provided on the inner side of thepower switch circuits PPSWb, PPSWc, and PPSWd, and therefore, the powerswitch circuits PPSWe do not include the n₂-fin×m₂ transistors and theend cap ECAP for securing the space SP1. Therefore, the power switchcircuit PPSWe includes only the n₂-fin×m₁ transistors and the n₂-fin×m₁transistors.

Hereinabove, in this embodiment, the power supply capacity can beimproved without increasing the layout area of the power switch circuitPPSW, in a manner similar to the above-described embodiments.

The above-described embodiments have been applied to the power switchcircuits PSW1 and PSW2 having FinFETs, for example. The above-describedembodiments may also be applied to power switch circuits includingplanar transistors, nanowire transistors, nanosheet transistors, forksheet transistors, complementary FETs (CFETs), vertical nanowiretransistors, and the like.

According to the present disclosure, the reduction of the power supplycapacity can be alleviated even in a case where the vacant area isrequired in the power switch circuit.

Although the present invention has been described above with referenceto the embodiments, the present invention is not limited to the featuresdescribed in the embodiments. These features can be changed withoutdeparting from the scope of the claimed subject matter, and can beappropriately determined according to the implementation to which thepresent invention is applied.

All examples and conditional language provided herein are intended forthe pedagogical purposes of aiding the reader in understanding theinvention and the concepts contributed by the inventor to further theart, and are not to be construed as limitations to such specificallyrecited examples and conditions, nor does the organization of suchexamples in the specification relate to a showing of the superiority andinferiority of the invention. Although one or more embodiments of thepresent invention have been described in detail, it should be understoodthat the various changes, substitutions, and alterations could be madehereto without departing from the spirit and scope of the invention.

What is claimed is:
 1. A semiconductor device comprising: a first powerline; a second power line; an end cap; and a first power switch circuitthat includes a first transistor and a second transistor, wherein thefirst transistor is connected to the first power line and the secondpower line, the second transistor is connected to the first power lineand the second power line, the first transistor includes a first numberof first fins that are extended in a first direction and arranged in asecond direction that is different from the first direction, the secondtransistor includes a second number of second fins that are extended inthe first direction and arranged in the second direction, the firstnumber is larger than the second number, and the second transistor isprovided between the end cap and the first transistor in the firstdirection.
 2. The semiconductor device according to claim 1, wherein theend cap includes the second number of third fins.
 3. The semiconductordevice according to claim 1, wherein the first power switch circuitincludes a third transistor that is connected to the first power lineand the second power line, the third transistor includes the secondnumber of fourth fins that are extended in the first direction andarranged in the second direction, and the third transistor is next tothe first transistor in the second direction.
 4. The semiconductordevice according to claim 1, further comprising a logic circuit; and afunctional circuit, wherein the end cap is provided between thefunctional circuit and the second transistor in the first direction. 5.The semiconductor device according to claim 4, wherein the logic circuitincludes the second number of fifth fins that are extended in the firstdirection and arranged in the second direction.
 6. The semiconductordevice according to claim 1, wherein the first power switch circuitincludes a fourth transistor that is connected to the first power lineand the second power line, the fourth transistor includes the secondnumber of sixth fins that are extended in the first direction andarranged in the second direction, and the fourth transistor is providedat an opposite side to the second transistor in the first direction. 7.The semiconductor device according to claim 4, further comprising asecond power switch circuit that includes a fifth transistor and a sixthtransistor, wherein the fifth transistor is connected to the first powerline and the second power line, the sixth transistor is connected to thefirst power line and the second power line, the fifth transistorincludes a third number of seventh fins that are extended in the firstdirection and arranged in the second direction, the sixth transistorincludes a fourth number of eighth fins that are extended in the firstdirection and arranged in the second direction, the third number islarger than the fourth number, and the sixth transistor is providedbetween the logic circuit and the fifth transistor in the firstdirection.
 8. The semiconductor device according to claim 7, wherein thelogic circuit includes the fourth number of ninth fins that are extendedin the first direction and arranged in the second direction.